JEOL JXA-8530F Electron Microprobe (EPMA)

The instrument is a dedicated field emission, wavelength dispersive electron microprobe (EPMA).

Quantitative elemental data can be obtained from most elements (Fluorine to Uranium) with detection limits of around 100ppm. The quantitation of:  B, C, N, and O is possible with suitable standards and sample material.

The field emission electron gun allows exceptional spacial resolution (100nM imaging) with high current at low kV beam currents.

Museum lead

Mr John Spratt
Electron probe microanalyst

Key facts

Technique: electron probe microanalysis (EPMA)